DTDM High-Precision Modular Temperature Controller Series

Delta‘s High-Precision Modular Temperature Controller DTDM Series adopts a highly integrated modular design for flexible configuration and expansion, offering ±0.1% high-precision temperature measurement and a 10 ms temperature sampling period . Supporting a variety of temperature control algorithms, it enables precise temperature management. The series supports the EtherCAT communication protocol to rapidly transmit the status and data of the temperature control group to the host computer. The DTDM Series is suitable for semiconductor wafer processing equipment such as Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and Oxidation & Diffusion furnaces, silicon etching machine, and Atomic Layer Deposition (ALD). — Features: Modular Design, Flexible Expansion Up to 32 PID loops & 128 input/output channels A single DTDM group can connect up to 8 measurement units and 8 I/O modules. The input channels and control loops can be configured flexibly. The I/O expansion modules